Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1996-03-28
1997-07-22
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
324751, 324 711, H01J 37256
Patent
active
056506201
ABSTRACT:
A method of verifying that a given insulative element conforms with a reference insulative element, comprising the steps of: emitting a primary beam of electrons impinging on the given insulative element, receiving a secondary beam of electrons returned by the given insulative element in response to emission of the primary beam of electrons, and comparing a curve as a function of time of the electrical current of the secondary beam received with a curve as a function of time of a reference electrical current to establish whether or not the given insulative element conforms to a reference insulative element.
REFERENCES:
patent: 4745362 (1988-05-01), Brust
patent: 5281909 (1994-01-01), Brust
Acroute Daniel
Faure Claude
Janah Hakim
Le Gressus Claude
Mirebeau Pierre
Alcatel Cable
Berman Jack I.
Commissariat a l''Energie Atomique
Nguyen Kiet T.
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