Method and device for treating surfaces using a glow...

Details Method and device for treating surfaces using a glow... Method and device for treating surfaces using a glow...

2005-07-19

2005-07-19

Chen, Bret (Department: 1762)

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

C427S577000, C427S578000, C427S579000, C118S7230ER, C118S7230ER

Reexamination Certificate

active

06919107

ABSTRACT:
In a process for treating a surface with the aid of a glow discharge plasma sustained in a gas of substantially ambient pressure between two electrodes (10, 10′) unwanted effects of plasma filaments occurring in such a plasma are prevented by positioning the surface (17) to be treated in an edge region (14′) of the plasma. The surface is placed on one side of a plasma space (14) defined by the electrode faces (11, 11′) beyond a pair of aligned edges (13, 13′) of the electrode faces (11, 11′), at a distance of a few millimeters from these edges (13, 13′), and facing these edges (13, 13′). The treatment gas or treatment gas mixture is fed to the plasma space (14) from a second side opposite the edge region (14′) in which the surface (17) to be treated is positioned. During treatment, a substrate (16) whose one surface (17) is to be treated is either stationary or is advanced in a direction substantially perpendicular to the electrode faces (11, 11′).

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