Method and device for the temperature control of surface...

Details Method and device for the temperature control of surface... Method and device for the temperature control of surface...

2006-01-10

2006-01-10

Jiang, Chen Wen (Department: 3744)

Refrigeration

Structural installation

With electrical component cooling

C427S248100, C118S725000, C219S389000, C219S390000

Reexamination Certificate

active

06983620

ABSTRACT:
The invention relates to a method for controlling the surface temperatures of substrates arranged on substrate supports borne by a substrate support carrier on dynamic gas cushions in a processing chamber of a CVD-reactor. The aim of the invention is to reduce or adjust the temperature variations. According to the invention, an average surface temperature value is calculated, being measured in a particularly optical manner, and the level of the gas cushions is regulated by varying the individually controlled gas flow producing the gas cushions in such a way that the variations of the measured surface temperatures in relation to the average value lies within a predetermined temperature window.

REFERENCES:
patent: 4860687 (1989-08-01), Frijlink
patent: 5177878 (1993-01-01), Visser
patent: 5549756 (1996-08-01), Sorensen et al.
patent: 5788777 (1998-08-01), Burk, Jr.
patent: 6005226 (1999-12-01), Aschner et al.
patent: 19855637 (2000-06-01), None
patent: WO 9013687 (1990-12-01), None
patent: WO 9851843 (1998-11-01), None

Affiliated with

Also associated with

Rating

Method and device for the temperature control of surface... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and device for the temperature control of surface..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and device for the temperature control of surface... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3566575