Method and device for the temperature control of surface...

Details Method and device for the temperature control of surface... Method and device for the temperature control of surface...

2005-04-12

2005-04-12

Meeks, Timothy (Department: 1762)

Coating processes

Measuring, testing, or indicating

C427S248100, C427S255500

Reexamination Certificate

active

06878395

ABSTRACT:
The invention relates to a method for controlling the surface temperatures of substrates arranged on substrate supports borne by a substrate support carrier on dynamic gas cushions in a processing chamber of a CVD-reactor. The aim of the invention is to reduce or adjust the temperature variations. According to the invention, an average surface temperature value is calculated, being measured in a particularly optical manner, and the level of the gas cushions is regulated by varying the individually controlled gas flow producing the gas cushions in such a way that the variations of the measured surface temperatures in relation to the average value lies within a predetermined temperature window.

REFERENCES:
patent: 4860687 (1989-08-01), Frijlink
patent: 5788777 (1998-08-01), Burk, Jr.
patent: 6005226 (1999-12-01), Aschner et al.
patent: 198 55 637 (2000-06-01), None
patent: WO 9013687 (1990-11-01), None
patent: WO 9851843 (1998-11-01), None

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