Method and device for surface inspection

Details Method and device for surface inspection Method and device for surface inspection

2007-07-17

2007-07-17

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

C356S237500

Reexamination Certificate

active

10732064

ABSTRACT:
A method for surface inspection, comprising the step of projecting at least two laser beams with different wavelengths to a same point to be inspected via a same projecting lens, the step of setting incident angles of the two laser beams so that fluctuations of values of reflectivity of the laser beams are complementary to each other, and the step of detecting reflected scattered light components.

REFERENCES:
patent: 5179422 (1993-01-01), Peterson
patent: 6104481 (2000-08-01), Sekine et al.
patent: 6731384 (2004-05-01), Ohshima et al.
patent: 6940604 (2005-09-01), Jung et al.
patent: 7050178 (2006-05-01), Morath et al.

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