Method and device for rastering source redundancy

Details Method and device for rastering source redundancy Method and device for rastering source redundancy

2005-05-17

2005-05-17

Tran, Thuy Vinh (Department: 2821)

Electric lamp and discharge devices: systems

Plural power supplies

Plural cathode and/or anode load device

C250S398000, C250S400000, C250S492300

Reexamination Certificate

active

06894435

ABSTRACT:
A method for scanning a specimen105with beams102of charged particles of a source group. Thereby, a plurality of target points402is scanned with a charged particle beam emitted by a source106and the same plurality of target points is scanned with at least one further charged particle beam emitted by at least one further source. Further, the charged particle beams from the source and the at least one further source are emitted on the same target point at different times. Additionally, a multiple charged particle beam source and a data feed system are provided. A source array104comprises at least one logical emitting unit106, wherein patterning information is shifted in a shift circuit140, and redundancy emitting units106, wherein individual redundancy emitting units obtain patterning information from the shift register.

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