Method and device for on-chip decoupling capacitor using...

Details Method and device for on-chip decoupling capacitor using... Method and device for on-chip decoupling capacitor using...

2007-07-17

2007-07-17

Menz, Douglas M. (Department: 2891)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S040000, C257S532000, C977S734000, C977S720000, C977S784000

Reexamination Certificate

active

10420774

ABSTRACT:
Apparatus for an on-chip decoupling capacitor. The capacitor includes a bottom electrode that consist of nanostructures deposited over a planarized metal, a dielectric material deposited over the nanostructures, and a top electrode deposited over the dielectric material. The shape of the bottom electrode is tunable by modulating the diameter and/or the length of the nanostructures to produce an increase in capacitance without increasing the footprint of the on-chip decoupling capacitor.

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