Method and device for observing a specimen in a field of...

Details Method and device for observing a specimen in a field of... Method and device for observing a specimen in a field of...

2006-11-08

2009-06-09

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S310000, C250S311000, C250S492300

Reexamination Certificate

active

07544936

ABSTRACT:
The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first angle and forming a first transmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.

REFERENCES:
patent: 3700801 (1972-10-01), Dougherty
patent: 4045669 (1977-08-01), Kamimura et al.
patent: 5084618 (1992-01-01), Ito
patent: 5134288 (1992-07-01), Van Dijck
patent: 5350921 (1994-09-01), Aoyama et al.
patent: 5466934 (1995-11-01), Adams et al.
patent: 5555319 (1996-09-01), Tsubusaki et al.
patent: 6259960 (2001-07-01), Inokuchi
patent: 6878934 (2005-04-01), Inada et al.
patent: 7012254 (2006-03-01), Inada et al.
patent: 7022989 (2006-04-01), Inada et al.
patent: 7164129 (2007-01-01), Inada et al.
patent: 2002/0170675 (2002-11-01), Libby et al.
patent: 2003/0012422 (2003-01-01), Sawai et al.
patent: 2005/0029452 (2005-02-01), Furukawa et al.
patent: 2005/0045821 (2005-03-01), Noji et al.
patent: 2006/0097169 (2006-05-01), Inada et al.
patent: 2007/0176103 (2007-08-01), Inada et al.
patent: 06-215720 (1994-05-01), None
patent: 10-135288 (1998-05-01), None
patent: 10-172488 (1998-06-01), None
Kobayashi, K., “Principles of Phase Only Correlation and Its Application”, ITE Technical Report, vol. 20, No. 41, pp. 1-6, MIP 96-53, NIM 96-75 (Jul. 1996).

Affiliated with

Also associated with

Rating

Method and device for observing a specimen in a field of... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and device for observing a specimen in a field of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and device for observing a specimen in a field of... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4142947