Method and device for observing a specimen in a field of...

Details Method and device for observing a specimen in a field of... Method and device for observing a specimen in a field of...

2007-01-16

2007-01-16

Nguyen, Thinh (Department: 2861)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S307000, C347S233000

Reexamination Certificate

active

11297329

ABSTRACT:
The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first angle and forming a first transmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.

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Kobayashi, K., “Principles of Phase Only Correlation and Its Application”, ITE Technical Report, vol. 20, No. 41, pp. 1-6, MIP 96-53, NIM 96-75 (Jul. 1996).

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