Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2005-04-12
2005-04-12
Nguyen, Lamson (Department: 2853)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S311000
Reexamination Certificate
active
06878934
ABSTRACT:
The present invention provides a method of observing a specimen ina field of view of an electron microscope comprising the acts of illuminating thespecimen with an electron beam having a first angle and forming a firsttransmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.
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Kobayashi, K., “Principles of Phase Only Correlation and Its Applications”, ITE Technical Report vol. 20, No. 41, pp. 1-6, MIP 96-53, NIM 96-75 (Jul. 1996).
Inada Hiromi
Kobayashi Hiroyuki
Nagaoki Isao
Dickstein , Shapiro, Morin & Oshinsky, LLP
Hitachi , Ltd.
Mouttet Blaise
Nguyen Lamson
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