Method and device for mounting pieces inside the vacuum chamber

Details Method and device for mounting pieces inside the vacuum chamber Method and device for mounting pieces inside the vacuum chamber

1980-05-29

1981-12-01

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250441, G21K 510

Patent

active

043038662

ABSTRACT:
A method for mounting pieces inside the vacuum chamber of an electron microscope, said chamber including a fixed cup-shaped body laterally closed by a mobile closure element supporting a piece holder, and detection means disposed inside said chamber; the method providing for provision of a transparent rigid mask which reproduces the shape of said chamber and said detection means, and is to be arranged in contact with said closure element before closing it to adjust the position of the piece to be observed.

REFERENCES:
patent: 3858049 (1974-12-01), Koch et al.
patent: 3886358 (1975-05-01), McLaughlin et al.
patent: 3983402 (1976-09-01), Arndt et al.

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