Method and device for measuring height of object whose surface h

Optics: measuring and testing – Range or remote distance finding – With photodetection

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Details

250214B, 250214C, 356375, 356376, G01C 300, G01B 1114, H01J 4014

Patent

active

053921100

ABSTRACT:
In a signal processing circuit, a height arithmetic circuit obtains a measured value of a height of an object by using the principle of triangulation from a second light receiving signal which is transmitted from a second photodetector of position detecting type thereto. An error arithmetic circuit acquires a measurement error by using the principle of triangulation from a first light receiving signal which is transmitted from a first photodetector of position detecting type thereto. A correction circuit calculates a correct height of the object by subtracting an output signal of the error arithmetic circuit from an output signal of the height arithmetic circuit.

REFERENCES:
patent: 3679307 (1972-07-01), Zoot et al.
patent: 4477185 (1984-10-01), Berger et al.
patent: 4639140 (1987-01-01), Lerat
patent: 5024529 (1991-06-01), Svetkoff
patent: 5213470 (1993-07-01), Koch

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