Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2009-08-27
2011-12-13
Johnston, Phillip A (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S310000, C250S311000
Reexamination Certificate
active
08076640
ABSTRACT:
The invention relates to a method and a device for measuring electron diffraction of a sample, including the steps of illuminating the sample with an incident electron beam which is deflected from a sample axis to hit the sample at an angle of incidence relative to the sample axis, at least partially subjecting the incident electron beam to diffraction by the sample, subjecting the diffracted and undiffracted electron beams transmitted through the sample to a partial deflection compensation, detecting the intensity of the diffracted and undiffracted electron beams transmitted through the sample in dependency on the angle of incidence and a scattering angle of the diffracted beam. The invention also relates to a computer program for controlling a transmission electron microscope for carrying out the inventive method.
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Caesar Rivise Bernstein Cohen & Pokotilow Ltd.
Johnston Phillip A
Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
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