Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate
2006-03-28
2006-03-28
Whitehead, Jr., Carl (Department: 2813)
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
C427S252000, C438S003000, C438S680000
Reexamination Certificate
active
07018676
ABSTRACT:
A method for manufacturing ceramics includes a step of forming a ceramic film on a substrate by mixing a fine particle of a raw material species which becomes at least part of raw materials for ceramics with an active species, and feeding the mixed fine particle and active species to the substrate. A manufacture device includes a disposing section which also serves as a heating section for a substrate, a raw material species feeding section for feeding a fine particle of a raw material species, an active species feeding section for feeding an active species, and a mixing section for mixing the raw material species and the active species.
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Doty Heather
Jr. Carl Whitehead
Oliff & Berridg,e PLC
Seiko Epson Corporation
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