Method and device for inspecting an object using a time...

Data processing: measuring – calibrating – or testing – Testing system – Signal generation or waveform shaping

Reexamination Certificate

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C702S084000, C702S104000, C702S108000, C702S124000, C324S750010

Reexamination Certificate

active

07076394

ABSTRACT:
A method for inspecting an object using a time delay integration sensor. A storage time of the time delay integration sensor is changed in response to a signal level of a signal outputted from the time delay integration sensor, and a scanning speed of a scan by the time delay integration sensor is changed in response to the signal level of the signal outputted from the time delay integration sensor. The object is then scanned using the time delay integration sensor to inspect the object under the changed storage time and the changed scanning speed.

REFERENCES:
patent: 6365897 (2002-04-01), Hamashima et al.
patent: 2002/0001759 (2002-01-01), Ohashi et al.
patent: 2004/0100629 (2004-05-01), Stokowski et al.
patent: P 2002-22673 (2002-01-01), None

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