Optics: eye examining – vision testing and correcting – Spectacles and eyeglasses – Ophthalmic lenses or blanks
Reexamination Certificate
2005-03-08
2005-03-08
Schwartz, Jordan M. (Department: 2873)
Optics: eye examining, vision testing and correcting
Spectacles and eyeglasses
Ophthalmic lenses or blanks
C351S166000, C427S162000, C427S165000
Reexamination Certificate
active
06863398
ABSTRACT:
A method for coating substrates (10) for optical components with essentially rotationally symmetric coatings employs a coating system equipped with a planetary-drive system (1) that has a rotating planet carrier (2) and several planets (4), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks (20) that allow controlling the radial variation in physical film thickness is arranged between a source (8) of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (β max) for every substrate also corotate with the primary carrier (2), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.
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Harry Bauer, et al., “Optical Coatings for UV Photolithography Systems”, SPIE, vol. 2776 (Aug. 1996), pp. 353-365.
Bauer Harry
Heller Matthias
Paul Hans-Jochen
Scheible Patrick
Ullmann Jens
Carl Zeiss SMT AG
Schwartz Jordan M.
Sughrue & Mion, PLLC
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