Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-01-09
2007-01-09
Wells, Nikita (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S505100, C250S498100
Reexamination Certificate
active
11045605
ABSTRACT:
The invention is directed to a method and an arrangement for plasma-based generation of soft x-radiation, particularly for the generation of extreme ultraviolet (EUV) radiation. The object of the invention, to find a novel possibility for providing a target for a plasma-based radiation source which permits a reduction in the heating and erosion of the nozzle and therefore permits an improved temperature control at the injection device, is met according to the invention in that a closure device is arranged between the target nozzle and the interaction region which interrupts an opening for temporarily passing the target flow by mechanically moving elements, wherein at least a portion of the target flow that is provided in a reproducible manner is separated in order to interact with the energy beam only during those time intervals in which an optical transmission from the interaction region to the target nozzle is prevented by the closure device.
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Gaebel Kai
Hergenhan Guido
Ziener Christian
Quash Anthony
Reed Smith LLP
Wells Nikita
Xtreme Technologies GmbH
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