4. Coherent light generators
  5. Particular beam control device
  6. Control of pulse characteristics

Xtreme Technologies GmbH

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Method and arrangement for the plasma-based generation of...

Radiant energy – Radiant energy generation and sources – With radiation modifying member
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Method for generating extreme ultraviolet radiation based on...

Radiant energy – Radiant energy generation and sources – With radiation modifying member
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Method for the stabilization of the radiation output of a...

Coherent light generators – Particular beam control device – Control of pulse characteristics
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