Method and arrangement for detecting secondary particles trigger

Details Method and arrangement for detecting secondary particles trigger Method and arrangement for detecting secondary particles trigger

1987-01-27

1989-02-07

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, 250197, G01N 2300, H01J 314

Patent

active

048033570

ABSTRACT:
A method and arrangement for imaging surface structures and distributions of voltages of a specimen using a scanning microscope that includes a detector system for detecting secondary electrons triggered at the specimen to be investigated. The detector system used includes a plurality of individual detectors arranged symmetrically relative to the specimen so that the secondary particles can be extracted largely symmetrically and independent of the emission point and emission angle. To detect secondary particles emitted in the direction of the symmetry axis of the detector system, an extraction field is generated with time dependent signals so that the secondary particles are accelerated in a momentarily highly asymmetrical field which is symmetrical on a chronological average, the secondary particles being deflected in a direction of regions sensitive to the secondary particles.

REFERENCES:
patent: 4011450 (1977-03-01), Tagawa et al.
patent: 4068123 (1978-01-01), Kokubo
patent: 4464571 (1974-08-01), Plies
vol. 6, No. 233, Nov. 19, 1982, for Japanese Patent No. 57-13357 (Patent Abstracts of Japan).
vol. 7, No. 170, Jul. 27, 1983, for Japanese Patent No. 58-78355 (Patent Abstracts of Japan).
vol. 9, No. 140, Jun. 14, 1985, for Japanese Patent No. 60-23944 (Patent Abstracts of Japan).
H. P. Feuerbaum, "VLSI Testing Using the Electron Probe", Scanning Electron Microscopy, vol. 1 (1979).

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