Method and apparatus used in fabrication of MEMS stacks

Details Method and apparatus used in fabrication of MEMS stacks Method and apparatus used in fabrication of MEMS stacks

2005-11-08

2005-11-08

Santiago, Mariceli (Department: 2879)

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

C445S025000, C438S106000, C438S107000, C438S108000, C438S109000

Reexamination Certificate

active

06962514

ABSTRACT:
Disclosed herein are methods of fabricating three dimensional Micro-Electro-Mechanical-Systems (MEMS). This method involved stacking of silicon-containing components which are separated by spacers. The stacked components are precision aligned and then may be bonded, retained or fastened together to form a rigid structure. Spaces created between MEMS device components by the separations may be filled with an electrically isolating fluid such as a gas or vacuum. Also disclosed is a method of aligning components relative to each other and an alignment jig which may be used to align the components.

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U.S. Appl. No. 09/739,078 of Harold Gross, filed Dec. 13, 2000 which has been allowed.

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