Radiant energy – Means to align or position an object relative to a source or...
Patent
1982-02-10
1984-04-17
Smith, Alfred E.
Radiant energy
Means to align or position an object relative to a source or...
2504922, H01J 37304
Patent
active
044437030
ABSTRACT:
A method and apparatus of deflection calibration for a charged particle beam exposure apparatus having an electromagnetic deflector and an electrostatic deflector both for deflecting a charged particle beam and a movable stage structure. The electromagnetic deflector is previously subjected to a calibration operation known per se. With a fiducial mark positioned in a predetermined location, the beam is deflected by the calibrated electromagnetic deflector instead of moving the stage structure, the beam is then deflected by the electrostatic deflector to detect the location of the fiducial mark, and deflection data are measured of the electrostatic deflection for the detection of the location of the fiducial mark. According to the present invention the calibration is performed in a short time without causing degradation of the precision of, e.g., lithography due to heat generated by movement of the stage structure.
REFERENCES:
Asai et al., "Distortion Correction and Deflection Calibration . . . ", J. Vac. Sci. Technol., vol. 16, No. 6, Nov./Dec. 1979, pp. 1710-1714.
Woodard et al., "Variable Spot Shape Control Electronics", J. Vac. Sci. Technol., vol. 16, No. 6, Nov./Dec. 1979, pp. 1783-1786.
Okubo Tsuneo
Ozasa Susumu
Saitou Norio
Shimazu Nobuo
Berman Jack I.
Hitachi , Ltd.
Nippon Telegraph & Telephone Public Corporation
Smith Alfred E.
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