Method and apparatus of concentrating chemicals for semiconducto

Details Method and apparatus of concentrating chemicals for semiconducto Method and apparatus of concentrating chemicals for semiconducto

1997-04-24

1999-05-04

Manoharan, Virgiinia

Distillation: processes, separatory

Convective distillation with normally gaseous medium, e.g., air

159 161, 159 262, 159DIG6, 159DIG15, 159DIG21, 159DIG35, 2022671, 202266, 203 86, 203100, B01D 114, B01D 300

Patent

active

059001240

ABSTRACT:
A method of concentrating chemicals for semiconductor devices, which includes the steps of heating a sample container by using a high-energy light source, vaporizing the chemicals by injecting a high-temperature gas into the sample container through an injection opening in the sample container and discharging the vaporized chemicals by the pressure of the gas through a gas outlet formed on the sample container. An apparatus of concentrating chemicals for semiconductor devices includes a sample container having a sample-supply window, a gas-injection opening and a gas outlet. A high-energy light source heats the sample container and a gas-supply source supplies the gas through a gas-injection opening in the sample container. A gas-heating device located between the sample container and the gas-supply source heats the gas provided by the gas-supply source.

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Edwin C. Kuehner et al., "Production and Analysis of Special High-Purity Acids Purified by Sub-Boiling Distillation", Journal of Analytical Chemistry, vol. 44, No. 12, p. 2050 (1972).

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