Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1995-04-25
1997-01-14
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250397, 250307, H01J 37252, G01N 23223, G01N 23225
Patent
active
055942466
ABSTRACT:
An X-ray analyzing method includes the steps of applying an irradiated electron beam, converged by a condenser lens and an objective lens into a thin beam, to the inside of a fine hole existing on the surface of a sample; observing X-rays generated from a residual substance existing inside the fine hole; and performing a qualitative and quantitative analysis of the residual substance. The X-rays are observed by an X-ray detector installed in an internal space of the condenser lens, an internal space of the objective lens, or between the condenser lens and the objective lens, by detecting only the X-rays radiated within the angular range -.theta. to +.theta., where .theta. is an angle formed with a center axis of the electron beam, and so defined that tan .theta. is substantially equal to a/d, where a and d are the radius and the depth of the fine hole, respectively.
REFERENCES:
patent: 4570072 (1986-02-01), Kimura et al.
patent: 4697080 (1987-09-01), King
patent: 5481109 (1996-01-01), Ninomiya et al.
Optical Systems for Soft X-Rays, Alan Michette, pp. 17-23 No date.
Kure Tokuo
Kuroda Katsuhiro
Mitsui Yasuhiro
Ninomiya Ken
Nishida Takashi
Berman Jack I.
Hitachi , Ltd.
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