Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1997-07-15
1999-03-02
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250307, G01N 23225, H01J 37256
Patent
active
058774980
ABSTRACT:
An X-ray analyzing method for inspecting opening states of fine holes comprises the steps of: irradiating a finely converged electron beam into a first fine hole, observing an X-ray emitted from the inside of said first fine hole in order to obtain an first X-ray analysis data about the residue substance existing at the bottom of said first fine hole; irradiating a finely converged electron beam into a second fine hole, observing an X-ray emitted from the inside of said second fine hole in order to obtain an second X-ray analysis data about the residue substance existing at the bottom of said second fine hole; and comparing said first X-ray analysis data with said second X-ray analysis data, forming a judgment as to whether or not a difference between said first and second analysis data is smaller than a predetermined threshold value and using an outcome of said judgment to determine the opening states of said first and second fine holes. The X-ray observations are carried out by detecting only the X-rays emitted within the angular range -.theta. to +.theta. where notation .theta. is an angle formed with a center axis of the irradiated electron beam and so defined that tan .theta. is equal to a/d whereas notations a and d are the radius and the depth of the fine holes.
REFERENCES:
patent: 4570072 (1986-02-01), Kimura et al.
patent: 4697080 (1987-09-01), King
patent: 5481109 (1996-01-01), Ninomiya et al.
patent: 5594246 (1997-01-01), Sudo et al.
Optical Systems For Soft X-Rays, Alan Michette, pp. 17-23.
Kure Tokuo
Kuroda Katsuhiro
Mitsui Yasuhiro
Ninomiya Ken
Nishida Takashi
Berman Jack I.
Hitachi , Ltd.
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