Electric heating – Metal heating – By arc
Patent
1987-11-20
1989-10-10
Albritton, C. L.
Electric heating
Metal heating
By arc
21912176, 21912184, 346762, 427 531, B23K 2600
Patent
active
048734136
ABSTRACT:
Method and apparatus for writing a line on a patterned substrate in which a direct writing of a CVD line is performed on at least two of patterned films on a substrate in accordance with the thermal decomposition of a CVD raw material gas which is resulted from the radiation of a laser beam. The laser beam is controlled in its power dependent on the difference between thermal conductivities of the at least two of patterned films to avoid a disconnection of the CVD line, the occurrence of thinner portion thereof and so on.
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D. J. Ehrlich et al., "Laser Microchemical Techniques for Reversible Restruting of Gate-Array Prototype Circuits", IEEE Electron Device Letters, vol. EDL-5, No. 2, pp. 32-35, Feb. 1984.
D. J. Ehrlich et al., "Laser Microreaction for Deposition of Doped Silicon Films", Appl. Phys. Lett. 39(12), Dec. 1981, pp. 957-959.
Morishige Yukio
Uesugi Fumihiko
Albritton C. L.
NEC Corporation
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