Method and apparatus for undocking substrate pod with door...

Details Method and apparatus for undocking substrate pod with door... Method and apparatus for undocking substrate pod with door...

2006-07-11

2006-07-11

Brahan, Thomas J. (Department: 3654)

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

C414S805000, C414S940000

Reexamination Certificate

active

07074000

ABSTRACT:
A pod loading station includes a docking mechanism adapted to move a pod between a docked position and an undocked position, and a door opener adapted to unlatch and open a pod door from the pod. A controller is coupled to the docking mechanism and the door opener and is programmed to cause the pod to move from the docked position to the undocked position, and then to cause the pod to move back to the docked position so that it can be determined whether the pod door is properly closed prior to completing the removal of the pod from the pod loading station.

REFERENCES:
patent: 4754344 (1988-06-01), Shoji et al.
patent: 6082951 (2000-07-01), Nering et al.
patent: 6427096 (2002-07-01), Lewis et al.
patent: 2002/0015636 (2002-02-01), Lee et al.
patent: 2002/0044859 (2002-04-01), Lee et al.
patent: 2002/0069933 (2002-06-01), Otaguro
patent: 2003/0103835 (2003-06-01), Nagata

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