Method and apparatus for transferring a semiconductor substrate

Details Method and apparatus for transferring a semiconductor substrate Method and apparatus for transferring a semiconductor substrate

2006-12-26

2006-12-26

Matecki, Kathy (Department: 3652)

Material or article handling

Article reorienting device

Orienter has article gripping means

C414S217000, C414S936000

Reexamination Certificate

active

07153088

ABSTRACT:
A method and apparatus for transferring a substrate is provided. In one embodiment, an apparatus for transferring a substrate includes at least one end effector. A disk is rotatably coupled to the end effector. The disk is adapted to rotate the substrate relative to the end effector. The end effector may additionally include a sensor coupled thereto. The sensor is adapted to detect an indicia of orientation of the substrate supported by the end effector. In another embodiment, a method for transferring a substrate includes rotating the substrate disposed on an end effector and detecting an indicia of orientation of the substrate.

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