Method and apparatus for thin metal film thickness measurement

Details Method and apparatus for thin metal film thickness measurement Method and apparatus for thin metal film thickness measurement

2007-04-17

2007-04-17

Verbitsky, Gail (Department: 2859)

Thermal measuring and testing

Distance or angle

Thickness, erosion, or deposition

C374S121000

Reexamination Certificate

active

10672019

ABSTRACT:
A method for measuring a metal film thickness is provided. The method initiates with heating a region of interest of a metal film with a defined amount of heat energy. Then, a temperature of the metal film is measured. Next, a thickness of the metal film is calculated based upon the temperature and the defined amount of heat energy. A chemical mechanical planarization system capable of detecting a thin metal film through the detection of heat transfer dynamics is also provided.

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