Method and apparatus for the recovery and recycling of condensab

Details Method and apparatus for the recovery and recycling of condensab Method and apparatus for the recovery and recycling of condensab

1984-07-26

1985-11-05

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

62 555, 156345, H01L 21306, B44C 122, C03C 1500, C23F 102

Patent

active

045511977

ABSTRACT:
A cold trap system is disclosed for recovering and recycling condensable gas reactants, such as xenon difluoride. Continuous recovery and recycling is achieved through a system including a plurality of cold traps and a storage chamber having a single input/output access pipe.

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patent: 4468283 (1984-08-01), Ahmed

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