Method and apparatus for the generation of distortion-free image

Details Method and apparatus for the generation of distortion-free image Method and apparatus for the generation of distortion-free image

1976-09-20

1977-11-08

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250398, H01J 3728

Patent

active

040577228

ABSTRACT:
A specimen to be analyzed under an electron microscope is oriented at an inclined angle relative to a plane normal to the beam. The beam is deflected to form a scanning raster to scan the specimen, and the raster and specimen are each rotated independently about the axis of the beam, to produce an image of the inclined specimen in which orthogonal lines in the sample are represented by orthogonal lines in the image. A microprocessor is employed for rotating the scanning raster relative to the specimen in accordance with its angle of inclination, the effective focal length of the electron lens, the primary beam voltage of the electron beam, and the current flowing through the condenser lens.

REFERENCES:
patent: 3900734 (1975-08-01), Kynaston et al.

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