Method and apparatus for the compensation of charges in secondar

Details Method and apparatus for the compensation of charges in secondar Method and apparatus for the compensation of charges in secondar

1985-01-31

1987-02-24

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250306, 250309, G01N 2300

Patent

active

046459294

ABSTRACT:
A method and an apparatus are provided for the compensation of charges in the secondary ion mass spectrometry of specimens exhibiting poor electrical conductivity. A scanning ion gun and an electron gun allow secondary ion mass spectra specimens exhibiting poor electrical conductivity to be registered under better-defined conditions than heretofore possible. The electron beam of the electron gun is focused to approximately the same diameter as the ion beam and impinges approximately the same point on the surface of the specimen as the ion beam.

REFERENCES:
patent: 3219817 (1965-11-01), Mollenstedt
patent: 3517191 (1970-06-01), Liebl
patent: 3878392 (1975-04-01), Yew et al.
patent: 4249077 (1981-02-01), Crawford
patent: 4420686 (1983-12-01), Onaguchi et al.

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