Method and apparatus for testing the function of microstructure

Details Method and apparatus for testing the function of microstructure Method and apparatus for testing the function of microstructure

1996-06-06

1998-11-10

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, 250214R, 2502141, 250552, 250553, G01R 31265

Patent

active

058347739

ABSTRACT:
The invention relates to a method as well as to apparatus for testing the function of microstructure elements, wherein the microstructure element is driven for testing the emission and/or mechanical properties and the corpuscles emitted or reflected by it are detected and evaluated.

REFERENCES:
patent: 3443166 (1969-05-01), Ing, Jr. et al.
patent: 4885534 (1989-12-01), Eck et al.
patent: 5338932 (1994-08-01), Theodore et al.
patent: 5378902 (1995-01-01), Pankove et al.

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