Measuring and testing – With fluid pressure – Porosity or permeability
Patent
1997-11-19
1999-08-17
Larkin, Daniel S.
Measuring and testing
With fluid pressure
Porosity or permeability
G01N 1508
Patent
active
059396172
ABSTRACT:
A method and an apparatus for testing the filtration efficiency of cloth materials intended for use as garments, masks, or gloves in a clean room environment where semiconductor chips are fabricated. The apparatus includes a support for holding the sample of cloth material to be tested; a gas ionizer for introducing an ionized gas into a chamber; an optional humidifier for introducing water vapor into the chamber; a particle generator for introducing particles into the chamber; and a particle counting assembly for counting the number of particles introduced into the chamber before and after they pass through the sample of cloth material being tested. Particles are introduced into the chamber after the static in the chamber has been removed by ionized gas, and the temperature and humidity in the chamber have been optionally adjusted. Filtration efficiency is determined by counting the total number of particles introduced into the chamber and the number of particles that pass through a sample of cloth material. Based on the filtration efficiency, the useful life of dust free clothes made out of the cloth material and worn by clean room operators can be determined.
REFERENCES:
patent: 4382378 (1983-05-01), Wadsworth et al.
patent: 5203201 (1993-04-01), Gogins
Han Youn-soo
Kim Hyun-joon
Lee Ok-sun
Lim Chang-su
Larkin Daniel S.
Samsung Electronics Co,. Ltd.
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