Patent
1997-03-25
1999-08-03
Teska, Kevin J.
G06F 9455
Patent
active
059336218
ABSTRACT:
A method and apparatus for emulating a dedicated terminal in semiconductor fabricator having a back end that includes a source of semiconductor substrates, a transport mechanism for transporting the substrates and a process chamber. A wall separates the back end from a front end environment. A central processing unit is provided that includes a driver for recognizing terminal text and display commands and that executes terminal text and display commands on the display screen of a terminal. A connector is provided at the back end and it is interconnected with the driver of the central processing unit. A microcomputer, that can be a laptop, personal computer or other relatively compact and portable computer is provided. This computer has a display screen and a commands entry device, such as a trackball or mouse, for manipulating commands on the display screen. The microcomputer recognizes commands input from the driver of the central processing unit and translates the commands into a printed form on the display screen. The microcomputer also translates commands in printed form on the display screen to a format recognized by the driver and it transmits the commands in this format to the driver.
REFERENCES:
patent: 4663009 (1987-05-01), Bloomquist et al.
patent: 5110249 (1992-05-01), Norman
patent: 5261079 (1993-11-01), Celi, Jr.
Lam Research Corporation
Mohamed Ayni
Teska Kevin J.
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