Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1984-08-21
1986-04-01
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
118728, 118 501, 118620, 156627, 156643, 156646, 156651, 156345, 156656, 156657, 156662, 204192C, 204192E, 204298, 252 791, 427 39, H01L 21306, B05B 502, B05D 306, B44C 122
Patent
active
045796238
ABSTRACT:
A gas is introduced into a vacuum chamber after the vacuum chamber is evacuated, and a plasma is generated within at least part of the vacuum chamber. The specimen surface is exposed to the plasma so that the surface is treated. A plurality of different gases, such as SF.sub.6, N.sub.2, and the like, are used as the gas being introduced. The quantity of the gas is changed during the surface treatment. A controller is used as a mechanism for changing the quantity of gas introduced. The controller is operated in accordance with a predetermined program, or by signals obtained by detecting the surface conditions of the specimen during the surface treatment.
REFERENCES:
patent: 4417947 (1983-11-01), Pan
patent: 4426246 (1984-01-01), Kravitz et al.
Ninomiya Ken
Nishimatsu Shigeru
Okada Osami
Okudaira Sadayuki
Suzuki Keizo
Hitachi , Ltd.
Powell William A.
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