Method and apparatus for suppressing disturbances in the measure

Details Method and apparatus for suppressing disturbances in the measure Method and apparatus for suppressing disturbances in the measure

1983-05-31

1985-09-03

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

G01N 2300

Patent

active

045394776

ABSTRACT:
A method and apparatus suppress a disturbance in the measurement of signals with a particle probe by providing and measuring a known reference voltage on a specimen at at least one time and using the measurement for eliminating the drift phenomena appearing in a measured signal and enables a significant increase in the precision of the measurement of signals. A secondary electron signal which results from a measurement of a reference voltage controls the operating point of a feedback circuit for suppressing the disturbance.

REFERENCES:
patent: 4277679 (1981-04-01), Feuerbaum
Feuerbaum H. P., "VLSI Testing Using the Electron Probe", Scanning Electron Microscopy, 1979, I, pp. 285-295.

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