Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
2008-04-09
2010-12-28
Lowe, Michael S (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
C414S217100, C414S800000, C414S940000, C198S346300, C198S465100
Reexamination Certificate
active
07857570
ABSTRACT:
In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.
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Elliott Martin R.
Englhardt Eric A.
Hudgens Jeffrey C.
Lowrance Robert B.
Rice Michael R.
Applied Materials Inc.
Dugan & Dugan
Lowe Michael S
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