Coating processes – Centrifugal force utilized
Patent
1997-02-07
1998-11-24
Bell, Janyce
Coating processes
Centrifugal force utilized
B05D 512
Patent
active
058403655
ABSTRACT:
Disclosed is a spinning chemical applicator for spin coating a work piece. The spinning chemical applicator includes a bowl having a base region and substantially curved walls. A chuck base having a chuck plate for holding the work piece, the chuck base and the chuck plate contained within an inner region of the bowl. A bowl covering lid being mounted on a top surface of the substantially curved walls. A plurality of upper venting holes being defined in the substantially curved walls, the plurality of upper venting holes defining a venting path to the inner region of the bowl. And plurality of venting drain holes defined in the substantially curved walls at an edge location that is substantially below each of the plurality of upper venting holes. The plurality of venting drain holes providing a venting and drain path for the inner region of the bowl.
REFERENCES:
patent: 2632725 (1953-03-01), Marks et al.
patent: 4068019 (1978-01-01), Boeckl
patent: 4075974 (1978-02-01), Plows et al.
patent: 4086870 (1978-05-01), Canavello et al.
patent: 4587139 (1986-05-01), Hagan et al.
patent: 4775550 (1988-10-01), Chu et al.
patent: 4838979 (1989-06-01), Nishida et al.
patent: 5003062 (1991-03-01), Yen
patent: 5013586 (1991-05-01), Cavazza
patent: 5439519 (1995-08-01), Sago et al.
patent: 5626675 (1997-05-01), Sakamoto et al.
patent: 5660634 (1997-08-01), Fujiyama et al.
Patent Abstracts of Japan, vol. 095, No. 009, Oct. 31, 1995 & JP. 07 142378 A;(Tokyo Electron Ltd; Others: 01), Jun. 2, 1995.
Patent Abstract of Japan, vol. 013, No. 275 (C-610), Jun. 23, 1989 & JP 01 070168 A (Hitachi Ltd.), Mar. 15, 1989.c c
Patent Abstracts of Japan, vol. 013, No. 024 (C-561), Jan. 19, 1989 & JP 63 229169 A (Hitachi Ltd.), Sep. 26, 1988.
Unknown, Patent Abstracts of Japan, vol. 097, No. 002, Feb. 28, 1997 & JP 08 273996 A (NEC Kansai Ltd.), Oct. 18, 1996.
Unknown, Patent Abstracts of Japan, vol. 097, No. 005, May 30, 1997 & JP 09 007918 A (M Setetsuku KK), Jan. 10, 1997.
Ebert Andreas
Ghafar Abdul
Bell Janyce
The Fairchild Corporation
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