Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2007-10-30
2007-10-30
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
Having polarization
Reexamination Certificate
active
10765904
ABSTRACT:
A method and an apparatus for the spatially resolved polarimetric examination of an imaging beam pencil (1) generated by an associated pulsed radiation source (9). A first and a second photoelastic modulator (6a, 6b) and a polarization element (5) are introduced serially into the beam path of the beam pencil. A control unit (8) activates a first modulation oscillation of the first photoelastic modulator and a second modulation oscillation of the second photoelastic modulator and drives the radiation source for outputting a respective radiation pulse in a manner dependent on the oscillation state of the first photoelastic modulator and/or the second photoelastic modulator. A detector (4) detects the beam pencil coming from the polarization element in a spatially resolved manner.
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Carl Zeiss SMT AG
Sughrue & Mion, PLLC
Turner Samuel A.
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