Method and apparatus for simultaneous SEM and optical...

Details Method and apparatus for simultaneous SEM and optical... Method and apparatus for simultaneous SEM and optical...

2011-06-28

2011-06-28

Johnston, Phillip A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C430S296000

Reexamination Certificate

active

07968843

ABSTRACT:
Method and apparatus capable of observing a liquid sample. An optical image of the sample and an image using a primary beam, such as an electron beam or charged-particle beam, can be obtained at the same time. The apparatus has a film including a first surface on which the liquid sample is held. The primary beam irradiation column and optical image acquisition viewer are located on opposite sides of the film that acts to block light.

REFERENCES:
patent: 2004/0114120 (2004-06-01), Van De Kerhof et al.
patent: 2005/0173632 (2005-08-01), Behar et al.
patent: 2005/0184233 (2005-08-01), Park et al.
patent: 2008/0308731 (2008-12-01), Nishiyama et al.
patent: 06-318445 (1994-11-01), None
patent: 2007-292702 (2007-11-01), None
Green, Evan Drake Harriman, Ph.D., Chapter 1, Introduction, Atmospheric scanning electron microscopy, Stanford University, 1993, pp. 1-12.

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