Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Patent
1998-03-03
2000-09-19
Ellis, Christopher P.
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
700228, 438908, G06F 700
Patent
active
061225665
ABSTRACT:
A method and apparatus for controlling a multiple chamber semiconductor wafer processing system. The processing system includes a plurality of process chambers about the periphery of the transfer chamber. A centrally located wafer transfer mechanism effects moving wafers between the process chambers. The process sequencer control is a real time, multi-tasking control program having a presequencer or look ahead feature for preventing delays in the processing. In one implementation, the look ahead feature identifies mid-sequence or oriented wafers which cannot be further processed because their destination chamber is busy. Rather than expend system resources waiting for the destination chamber to become available, the wafers are transferred to a holding position, preferably the load lock, and rescheduled at the earliest time to finish their processing.
REFERENCES:
patent: 5024570 (1991-06-01), Kiriseko et al.
patent: 5105362 (1992-04-01), Kotani
patent: 5864485 (1999-01-01), Hawthorn et al.
patent: 5928389 (1999-07-01), Jevtic
Lavi Michal
Nguyen Thu
Applied Materials Inc.
Ellis Christopher P.
Tran Khoi H.
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