Method and apparatus for self-calibration of a substrate...

Details Method and apparatus for self-calibration of a substrate... Method and apparatus for self-calibration of a substrate...

2008-01-15

2008-01-15

Black, Thomas (Department: 3661)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Robot control

C700S245000, C414S757000, C414S816000, C536S025300

Reexamination Certificate

active

10705175

ABSTRACT:
A substrate-handling robot which serves a processing tool such as a plating tool may be automatically controlled by a controller to perform a self-calibration procedure. As part of the procedure, an end effector of the robot is moved to interact with sensors provided on a calibration fixture that is positioned in a substrate placement location for which the calibration procedure is performed. The calibration fixture may have an opening formed therein to allow movement of the robot end effector within the calibration fixture. Sensor light beams generated by the sensors may interact with the end effector during the automatic calibration process so as to determine calibration data for the substrate placement location.

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patent: 2001-210692 (1998-01-01), None
patent: 10006262 (2001-08-01), None

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