Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2005-04-19
2005-04-19
Font, Frank G. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S310000, C250S306000, C250S307000, C250S491100
Reexamination Certificate
active
06881956
ABSTRACT:
An apparatus and method for scanning the surface of a specimen is disclosed for defect inspection purposes. Scanning Electron Microscope (SEM) is used to scan the surface of a specimen. The scanning method employed by the SEM comprises the steps of: generating a particle beam from a particle beam emitter, and scanning the surface of the specimen by bending the particle beam at an angle with respect to the surface of the specimen, wherein the particle beam traverses an angle that is not parallel or perpendicular to the orientation of the specimen. The specimen being scanned is a semiconductor wafer or a photomask.
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Chen Zhongwei
Jau Jack Y.
Font Frank G.
Hermes-Microvision, Inc.
Hughes James P.
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