Method and apparatus for reviewing defects

Details Method and apparatus for reviewing defects Method and apparatus for reviewing defects

2007-01-30

2009-10-13

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C356S237400

Reexamination Certificate

active

07601954

ABSTRACT:
A method and an apparatus for reviewing defects detected by an optical particle inspection system or an optical profile inspection system in detail by an electron microscope are provided. In order to putting defects to be reviewed in the viewing field of the electron microscope and reducing the size of the apparatus, the electron microscope reviews defects detected by an optical defect inspection system. In the electron microscope, an optical microscope for reviewing detects is arranged, and when focusing of this optical microscope is carried out, the illumination position and the detection position of the optical microscope are not changed to the sample.

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patent: 2005-156537 (2005-06-01), None

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