Method and apparatus for reducing particulates in a plasma tool

Details Method and apparatus for reducing particulates in a plasma tool Method and apparatus for reducing particulates in a plasma tool

1993-12-23

1996-05-21

Wilczewski, Mary

Coating apparatus

Gas or vapor deposition

With treating means

C23C 1600

Patent

active

055185479

ABSTRACT:
A method and apparatus for reducing particulates in a plasma tool using steady state flows includes a device, operatively coupled to a housing in which an object to be processed is positioned, for generating a plasma flow adjacent the object toward a pumping aperture. A pumping mechanism pumps a medium adjacent the object. The medium supports the plasma and entrains particulates in the plasma away from the object and out the pumping aperture. Magnetic fields, produced by multipole magnets forming a ring cusp, are preferably used to produce the plasma flow which is directed radially away from the object to be processed. In a second embodiment, an array of magnets which form a line cusp is provided to produce an opening through which plasma will flow.

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