Method and apparatus for real time monitoring of an electric...

Details Method and apparatus for real time monitoring of an electric... Method and apparatus for real time monitoring of an electric...

2007-11-27

2007-11-27

Hofsass, Jeffery (Department: 2612)

Communications: electrical

Condition responsive indicating system

Specific condition

C340S652000, C340S664000, C219S510000

Reexamination Certificate

active

10910481

ABSTRACT:
Heating coils used in an electric furnace used to process semiconductor wafers are monitored on a real time basis by sensing the AC current in a power line delivering electrical power to the furnace. The AC current is sensed by a coil positioned around and magnetically coupled with the power line. The sensed AC current induces an AC voltage in the coil which is converted by an electrical circuit into a DC voltage. The DC voltage is used to control a solid state relay that generates an alarm signal when the value of the DC voltage is less than a preselected value indicating that an open circuit is present in the heating coil.

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patent: 5668537 (1997-09-01), Chansky et al.
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