Method and apparatus for reactive plasma atomization

Details Method and apparatus for reactive plasma atomization Method and apparatus for reactive plasma atomization

1997-10-23

1999-08-17

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

118 50, 118723VE, 118726, 427216, 427250, 4272552, 427295, 427318, H05H 124

Patent

active

059391510

ABSTRACT:
A method and apparatus for producing AlN powder employing a vacuum chamber with a nozzle thereon having a hollow center crucible of graphite with a small feed hole in the bottom thereof. A device is provided for heating and melting aluminum in the crucible. A plasma gun connected to a source of argon and nitrogen is ignited below said feed hole, and melted aluminum moves into the plume of said plasma gun. The melted aluminum is atomized in the plume, and the droplets of aluminum are vaporized and react to the nitrogen in the plume, to create AlN which is collected in a collecting chamber.

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Peter C. Kong & Emil Pfender, "Plasma Processes", Carbide, Nitride and Boride Materials Synthesis and Processing. Published 1997, ISBN 0 412 54060 6. pp. 359-387. (No month available).

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