Method and apparatus for quantitative three-dimensional...

Details Method and apparatus for quantitative three-dimensional... Method and apparatus for quantitative three-dimensional...

2007-12-25

2007-12-25

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000, C250S201300, C250S461200, C382S128000, C382S131000

Reexamination Certificate

active

11099489

ABSTRACT:
A method and an apparatus are for three-dimensional tomographic image generation in a scanning electron microscope system. At least two longitudinal marks are provided on the top surface of the sample which include an angle therebetween. In consecutive image recordings, the positions of these marks are determined and are used to quantify the slice thickness removed between consecutive image recordings.

REFERENCES:
patent: 6114695 (2000-09-01), Todokoro et al.
patent: 6855938 (2005-02-01), Preikszas et al.
patent: 7003143 (2006-02-01), Hewitt et al.
patent: 7088852 (2006-08-01), Bruce et al.
patent: WO2003/071578 (2003-08-01), None

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