Method and apparatus for producing molecular film

Details Method and apparatus for producing molecular film Method and apparatus for producing molecular film

1997-11-04

1999-09-07

Cameron, Erma

Coating processes

With post-treatment of coating or coating material

Liquid extraction of coating constituent or cleaning coating

427359, 427377, 427387, 4273881, 4273897, B05D 128

Patent

active

059484764

ABSTRACT:
A method for forming a molecular film includes the steps of: coating a surface of a substrate having active hydrogen atoms on its surface with a coating solution containing a silane-based compound having at least one reactive group selected from the group consisting of a chloro group, an alkoxy group and an isocyanate group; and effecting an elimination reaction between the active hydrogen atoms on the surface of the substrate and reactive groups of the silane-based compound, thereby covalently bonding the silane-based compounds to the surface of the substrate. The substrate is supplied to a chamber in which an atmosphere is maintained at a low water vapor density. The surface of the substrate is coated with a coating solution containing the silane-based compound and a solvent by using a transfer element. A dehydrochlorination reaction is effected between the active hydrogen atoms and the chloro groups of the silane-based compounds. Thereafter, any coating solution containing unreacted silane-based compounds after coating is removed inside or outside the chamber.

REFERENCES:
patent: 5108784 (1992-04-01), Anderson et al.
patent: 5505997 (1996-04-01), Strong et al.
patent: 5512131 (1996-04-01), Kumar et al.

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