Method and apparatus for producing diamond thin films

Details Method and apparatus for producing diamond thin films Method and apparatus for producing diamond thin films

1991-12-23

1993-11-02

Padgett, Marianne

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

427569, 423446, B05D 306, B01J 306

Patent

active

052582060

ABSTRACT:
The present invention concerns a method of producing a diamond thin film. A plasma-activated gas, obtained by exciting a starting material containing a carbon source gas, is brought into contact with a surface of a substrate, on which a diamond thin film is to be formed under the presence of an auxiliary member placed adjacent to a protruded portion present at the surface of the substrate. The diamond thin film is thereby formed on the substrate. An apparatus for producing a diamond thin film by means of a microwave plasma method has an auxiliary member placed adjacent to a protruded portion present at the surface of the substrate on which the diamond thin film is to be formed.

REFERENCES:
patent: 4767608 (1988-08-01), Matsumoto et al.
patent: 4816286 (1989-03-01), Hirose
patent: 4859490 (1989-08-01), Ikegaya et al.
patent: 4869923 (1989-09-01), Yamazaki
patent: 4935303 (1990-06-01), Ikoma et al.
patent: 4938940 (1990-07-01), Hirose et al.
patent: 4946568 (1990-08-01), Kalwar et al.
patent: 4989543 (1991-02-01), Schmitt
patent: 5007373 (1991-04-01), Legg et al.
"Diamond Thin Films", Chem. & Eng. News, May 15, 1989, pp. 32-33.
Singh et al. Applied Physics Letters, vol. 52, No. 6, pp. 451-452, Feb. 8, 1988.
Pellicori et al. Journal of Vacuum Science & Technology/Part A, vol. 4, No. 5, 2nd series, pp. 2350-2355, Sep.-Oct. 1986.
Journal of Crystal Growth, vol. 93, Nos. 1-4, pp. 228-234, Nov.-Dec. 1988 Wang et al.

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